Enabled Scaling Capability with Self-aligned Multiple patterning process

Autor:	Masatoshi Yamato, Shoichi Yamauchi, Arisa Hara, Hidetami Yaegashi, Kenichi Oyama, Sakurako Natori
Rok vydání:	2014
Předmět:	Materials science Polymers and Plastics Organic Chemistry Materials Chemistry Process (computing) Electronic engineering Multiple patterning Scaling Smoothing
Zdroj:	Journal of Photopolymer Science and Technology. 27:491-496
ISSN:	1349-6336 0914-9244
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2f9af5fe8df8cd823f36df3a9bfc40a3 https://doi.org/10.2494/photopolymer.27.491 Zobrazit plný text záznamu