Differential Charging in XPS. Part II: Sample Mounting and X-ray Flux Effects on Heterogeneous Samples

Autor: Julia E. Fulghum, Brian J. Tielsch, David J. Surman
Rok vydání: 1996
Předmět:
Zdroj: Surface and Interface Analysis. 24:459-468
ISSN: 1096-9918
0142-2421
Popis: Factors which affect photoelectron peak positions on heterogeneous samples are evaluated using patterned indium tin oxide (ITO) on glass. Local sample environment, sample mounting and spatial variation in x-ray flux are all shown to contribute to differential charging effects if no charge neutralization is used. X-ray photoelectron spectroscopy data acquisition using both Mg Kα and monochromatic Al Kα x-ray sources shows that confusing and potentially misleading results can be obtained if samples are mounted such that only part of the surface is grounded to the spectrometer. In this case, multiple photoelectron peaks were observed for each photoelectron line of each element in the sample. However, more significant differential charging artifacts were observed from the insulating glass than from the ITO. The proximal causes of the photoelectron peak shifts were evaluated using imaging XPS in conjunction with small-area spectroscopy.
Databáze: OpenAIRE