Reducing curtaining effects in FIB/SEM applications by a goniometer stage and an image processing method
| Autor: | Tilmann Beck, Gabriele Steidl, Thomas Henning Loeber, Frank Balle, Sebastian Schuff, Dietmar Eifler, Bert Laegel, Jan Henrik Fitschen, Sandra Wolff |
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| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
Materials science business.industry Scanning electron microscope Process Chemistry and Technology Image processing Nanotechnology 02 engineering and technology Surface finish 021001 nanoscience & nanotechnology 01 natural sciences Focused ion beam Sample (graphics) Surfaces Coatings and Films Electronic Optical and Magnetic Materials Optics Goniometer 0103 physical sciences Materials Chemistry Surface roughness Sample preparation Electrical and Electronic Engineering 0210 nano-technology business Instrumentation |
| Zdroj: | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 35:06GK01 |
| ISSN: | 2166-2754 2166-2746 |
| DOI: | 10.1116/1.4991638 |
| Popis: | In the last two decades, focused ion beam (FIB) systems have been used for sample preparation. For example, the edges of a sample can be polished for analytical measurements or continuous cross-sections can be milled for three-dimensional (3D) tomography and reconstruction. One major challenge in both procedures is the so-called curtaining effect, i.e., increasing surface roughness in the direction of the milling depth. The roughness of the cut can influence the result of the measurement and the segmentation process. In the present study, the authors report on two different methods to reduce the curtaining effect, namely, a hardware- and a software-based solution. For instance, Tescan implemented the so-called “rocking stage” in its plasma FIB. However, this is not available for other FIB systems. Therefore, for our FEI gallium FIB, an inhouse-developed goniometer stage is installed, which can be adapted as necessary. With this relatively inexpensive solution, the sample can be rotated around an additiona... |
| Databáze: | OpenAIRE |
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