Fine‐grained 3C‐SiC thick films prepared via hybrid laser chemical vapor deposition
| Autor: | Takashi Goto, Mingxu Han, Lianmeng Zhang, Hong Cheng, Youfeng Lai, Song Zhang, Qizhong Li, Meijun Yang, Zhenglin Jia, Rong Tu |
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| Rok vydání: | 2019 |
| Předmět: | |
| Zdroj: | Journal of the American Ceramic Society. 102:5668-5678 |
| ISSN: | 1551-2916 0002-7820 |
| DOI: | 10.1111/jace.16445 |
| Databáze: | OpenAIRE |
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