On Updating a Virtual Metrology Model in Semiconductor Manufacturing via Transfer Learning

Autor:	Rebecca Clain, Ikram Azzizi, Valeria Borodin, Agnes Roussy
Rok vydání:	2022
Zdroj:	2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2f5a9b6019912090668fd72b5d227157 https://doi.org/10.1109/asmc54647.2022.9792514 Zobrazit plný text záznamu