Controllable excimer-laser fabrication of conical nano-tips on silicon thin films
| Autor: | R.J. Baird, Greg Auner, Golam Newaz, Ivan Avrutsky, Daniel G. Georgiev |
|---|---|
| Rok vydání: | 2004 |
| Předmět: |
Materials science
Physics and Astronomy (miscellaneous) Excimer laser Silicon business.industry medicine.medical_treatment Scanning confocal electron microscopy Atomic force acoustic microscopy chemistry.chemical_element Scanning capacitance microscopy Conductive atomic force microscopy Optics chemistry medicine business Non-contact atomic force microscopy Photoconductive atomic force microscopy |
| Zdroj: | Applied Physics Letters. 84:4881-4883 |
| ISSN: | 1077-3118 0003-6951 |
| DOI: | 10.1063/1.1762978 |
| Popis: | We have found conditions for the reproducible, direct laser fabrication of sharp conical tips with heights of about 1 μm and apical radii of curvature of several tens of nanometers. An individual cone is formed when single-crystalline silicon on a silica substrate is irradiated with a single pulse from a KrF excimer laser, homogenized and shaped to a circular spot several microns in diameter. Atomic force microscopy and field-emission scanning electron microscopy were used to characterize these structures. A simple mechanism of formation based on movement of melted material is proposed. Our results suggest that this technique could produce even smaller structures by optimizing the laser processing geometry. |
| Databáze: | OpenAIRE |
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