A High Q Value ScAlN/AlN-Based SAW Resonator for Load Sensing
| Autor: | Wenjuan Liu, Yao Cai, Binghui Lin, Yi Zhang, Zhou Jie, Chengliang Sun, Yan Liu, Yang Zou |
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| Rok vydání: | 2021 |
| Předmět: | |
| Zdroj: | IEEE Transactions on Electron Devices. 68:5192-5197 |
| ISSN: | 1557-9646 0018-9383 |
| DOI: | 10.1109/ted.2021.3107232 |
| Popis: | This article presents a high quality factor ( ${Q}$ ) load sensor based on Sc0.2Al0.8N/aluminum nitride (AlN)-on-silicon surface acoustic wave (SAW) resonator. Finite element method (FEM) analysis is performed to predict the resonance frequency and the wave propagation mode. A high- ${Q}$ of 7200 at the parallel resonance frequency ( ${f}_{p}$ ) of 447.50 MHz is measured for Sc0.2Al0.8N/AlN configured SAW resonator on a silicon substrate. Experimental values for variation of series resonance frequency ( ${\Delta } {f}_{s}$ ) and variation of ${f}_{p}$ ( ${\Delta } {f}_{p}$ ) are found to be −75.3 and −186.8 kHz with variation of applied force $({\Delta } \textit {F)} = 4.155$ N, operating in the analyzed range. The linear approximation of measured frequency variations under force is ${\Delta } {f}_{s}/{F} = -12.7$ kHz/N and ${\Delta } {f}_{p}/{F} = -46.2$ kHz/N. Moreover, the force sensitivities for this sensor are −28.4 and −103.2 ppm/N for ${f}_{s}$ and ${f}_{p}$ , respectively. This high- ${Q}$ scandium-doped AlN (ScAlN)/AlN-based SAW resonator exhibits high sensitivity, demonstrating that the structure can be used as load sensors in industrial applications such as manufacturing, medical, grocery, and automotive industries. |
| Databáze: | OpenAIRE |
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