Design and performance analysis of deep-etch air/nitride distributed Bragg reflector gratings for AlInGaN laser diodes
| Autor: | C Marinelli, T. Takeuchi, Mohamed Benyoucef, Richard P. Schneider, Richard V. Penty, L.J. Sargent, Mhh Kuball, Ian H. White, Peter J Heard, Ghulam Hasnain, Judy M Rorison, Mariangela Gioannini, M Bordovsky |
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| Rok vydání: | 2001 |
| Předmět: | |
| Zdroj: | Applied Physics Letters. 79:4076-4078 |
| ISSN: | 1077-3118 0003-6951 |
| DOI: | 10.1063/1.1424061 |
| Popis: | The key parameters in the fabrication of deep-etch high-order λ/4 Bragg gratings for short-wavelength nitride-based lasers are investigated. Calculations indicate that, for an air-gap thickness of 1.73 μm and single-spot Gaussian beam profile, the reduction in grating reflectivity due to light diffraction in the air gaps is only 17% with respect to a first-order structure with 0.1 μm air gaps. Scanning electron microscopy and microphotoluminescence characterizations confirm the validity of the numerical predictions and show that the 28%–38% reflectivity obtained from prototype focused-ion-beam-etched air/nitride gratings is mainly limited by imperfections and material disorder due to etching. Improving the etching technique would, therefore, allow standard lithographic fabrication of reduced-threshold GaN lasers. |
| Databáze: | OpenAIRE |
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