Piezoelectrically Actuated Micromirror with Dynamic Deformation Compensation Mechanism

Autor:	Takashi Sasaki, Adrien Piot, Jaka Pribošek, Anton Lagosh, Clement Fleury, Markus Bainschab, Yanfen Zhai, Marcus Baumgart, Sara Guerreiro, Dominik Holzmann, Aleš Travnik, Mohssen Moridi
Rok vydání:	2023
Zdroj:	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2ec4e486f3d0a53923b6e69e9fb1b03b https://doi.org/10.1109/mems49605.2023.10052289 Zobrazit plný text záznamu