Silicon nitride on-silicon 3-dimensional photonic circuits for integrated photodetection
| Autor: | Imad Agha, Qiwen Zhan, Andrew Sarangan, mike buzbee, David Lombardo, Joshua R. Hendrickson |
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| Rok vydání: | 2016 |
| Předmět: |
Fabrication
Materials science Silicon Physics::Instrumentation and Detectors Hybrid silicon laser business.industry Photonic integrated circuit Physics::Optics chemistry.chemical_element Hardware_PERFORMANCEANDRELIABILITY Photodetection Condensed Matter::Materials Science chemistry.chemical_compound Silicon nitride chemistry Hardware_INTEGRATEDCIRCUITS Optoelectronics Photonics business Electronic circuit |
| Zdroj: | Advanced Photonics 2016 (IPR, NOMA, Sensors, Networks, SPPCom, SOF). |
| DOI: | 10.1364/iprsn.2016.itu1a.3 |
| Popis: | We develop a new technique for integrating waveguide detectors in a silicon nitride photonic circuit. Fabrication relies on a novel method of selective oxidation as an alternative to chemical-mechanical-planarization with higher yield and tolerance. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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