Continuous composition-spread thin films of transition metal oxides by pulsed-laser deposition
| Autor: | Hans M. Christen, Srivatsan Sathyamurthy, Christopher M. Rouleau, D. H. Lowndes, David Mandrus, Hong-Ying Zhai, Peter G. Khalifah, Isao Ohkubo |
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| Rok vydání: | 2004 |
| Předmět: |
Materials science
business.industry Alloy General Physics and Astronomy Mineralogy Surfaces and Interfaces General Chemistry Substrate (electronics) engineering.material Condensed Matter Physics Laser Surfaces Coatings and Films Pulsed laser deposition law.invention Transition metal law visual_art engineering visual_art.visual_art_medium Optoelectronics Deposition (phase transition) Ceramic Thin film business |
| Zdroj: | Applied Surface Science. 223:35-38 |
| ISSN: | 0169-4332 |
| DOI: | 10.1016/s0169-4332(03)00914-0 |
| Popis: | We have designed an improved pulsed-laser deposition–continuous composition-spread (PLD–CCS) system that overcomes the difficulties associated with earlier related techniques. Our new PLD–CCS system is based on a precisely controlled synchronization between the laser firing, target exchange, and substrate translation/rotation, and offers more flexibility and control than earlier PLD-based approaches. Most importantly, the deposition energetics and the film thickness are kept constant across the entire composition range, and the resulting samples are sufficiently large to allow characterization by conventional techniques. We fabricated binary alloy composition-spread films composed of SrRuO 3 and CaRuO 3 . Alternating ablation from two different ceramic targets leads to in situ alloy formation, and the value of x in Sr x Ca x −1 RuO 3 can be changed linearly from 0 to 1 (or over any arbitrarily smaller range) along one direction of the substrate. |
| Databáze: | OpenAIRE |
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