Impact of heat treatment process on threshold current density in AlGaN-based deep-ultraviolet laser diodes on AlN substrate

Autor:	Hiroshi Amano, Ziyi Zhang, Leo J. Schowalter, Naoharu Sugiyama, Maki Kushimoto, Yoshio Honda, Chiaki Sasaoka
Rok vydání:	2021
Předmět:	Threshold current Materials science business.industry Treatment process General Engineering General Physics and Astronomy Substrate (printing) medicine.disease_cause Laser law.invention law medicine Optoelectronics business Ultraviolet Diode
Zdroj:	Applied Physics Express. 14:051003
ISSN:	1882-0786 1882-0778
Popis:	The electroluminescence (EL) uniformity of AlGaN-based deep UV laser diodes on AlN substrate was analyzed by using the EL imaging technique. Although nonuniform EL patterns were observed, the uniformity was improved by changing the position of the p-electrode. The threshold current density was also reduced by suppressing the inhomogeneity of the EL. Cathodoluminescence analysis revealed that the cause of the non-uniformity is the degradation of the active layer and the nonuniformity emission formed by rapid thermal annealing at high temperature after mesa structure formation.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2e7cc63734ebfe2a05f8e8e8a5d7a7a1 https://doi.org/10.35848/1882-0786/abf443 Zobrazit plný text záznamu