Heteroepitaxial ZnO/6H-SiC structures fabricated by chemical vapor deposition
Autor: | B. M. Ataev, G. A. Onushkin, S. Sh. Makhmudov, Ya. I. Alivov, V. V. Mamedov, E.V. Kalinina, A. K. Omaev |
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Rok vydání: | 2005 |
Předmět: |
Inorganic Chemistry
Fabrication Materials science Chemical engineering Hybrid physical-chemical vapor deposition Plasma-enhanced chemical vapor deposition Inorganic chemistry Materials Chemistry Heterojunction Chemical vapor deposition Combustion chemical vapor deposition Condensed Matter Physics Luminescence |
Zdroj: | Journal of Crystal Growth. 275:e2471-e2474 |
ISSN: | 0022-0248 |
DOI: | 10.1016/j.jcrysgro.2004.11.379 |
Popis: | We report on the first results of n-ZnO/p-SiC heterostructures fabrication by chemical vapor deposition in the low-pressure system. The structural and luminescence properties of these structures are studied. |
Databáze: | OpenAIRE |
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