Direct fabrication of polyimide waveguide grating by synchrotron radiation

Autor:	Tetsuyoshi Ishii, Toshiyuki Horiuchi, Kobayashi Junya, Tohru Maruno, Toshiaki Tamamura
Rok vydání:	1998
Předmět:	Materials science Physics and Astronomy (miscellaneous) business.industry Synchrotron radiation Grating Waveguide (optics) Full width at half maximum Optics Ultraviolet light Optoelectronics business Refractive index Diffraction grating Polyimide
Zdroj:	Applied Physics Letters. 73:3336-3338
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.122761
Popis:	Synchrotron radiation induces a change in the refractive index of a fluorinated polyimide by an order of 10−2, which is about ten times larger than the change it induces in silica glass irradiated by ultraviolet light, presumably due to fluorine detachment and subsequent volume compaction. We have fabricated a 0.51-μm-period grating structure in an embedded waveguide through a 15-μm-thick overcladding by using an x-ray mask with a spatially modulated pattern. The grating is fabricated at a dose of 160 A s and shows a reflectivity of 60% and a full width at half maximum as narrow as 0.25 nm at around a wavelength of 1.55 μm.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2e52bb50ff08d9128986aa9f21a09b34 https://doi.org/10.1063/1.122761 Zobrazit plný text záznamu