Effects of MOS Metallization Geometry and Processing on Mobile Impurities

Autor:	Arthur J. Learn
Rok vydání:	1975
Předmět:	Materials science Renewable Energy Sustainability and the Environment Impurity business.industry Materials Chemistry Electrochemistry Electrical engineering Optoelectronics Condensed Matter Physics business Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Journal of The Electrochemical Society. 122:1127-1132
ISSN:	1945-7111 0013-4651
DOI:	10.1149/1.2134409
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2e0ba524c58e04b20f08bb58baf55354 https://doi.org/10.1149/1.2134409 Zobrazit plný text záznamu