Effect of argon cluster ion beam on fused silica surface morphology
| Autor: | I. V. Nikolaev, M. A. Roenko, N. G. Korobeishchikov |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Nuclear and High Energy Physics Range (particle radiation) Argon Materials science Ion beam Spectral density chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Molecular physics Ion chemistry 0103 physical sciences Surface roughness Cluster (physics) Spatial frequency 0210 nano-technology Instrumentation |
| Zdroj: | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 438:1-5 |
| ISSN: | 0168-583X |
| DOI: | 10.1016/j.nimb.2018.10.019 |
| Popis: | The gas cluster ion bombardment technique is promising for low-damage surface smoothing of optical materials. In this work, the morphology evolution of fused silica surfaces during argon cluster ion beam processing was investigated. To characterize the surface roughness, power spectral density functions (PSD) were obtained from a wide spatial frequency range of measurements. The power spectral density function dependencies on the depth of the removed material and cluster ion parameters are shown. Based on the experimental results, it is demonstrated that the use of gas clusters of different sizes and specific energy allows a fused silica surface to be smoothed in the middle spatial frequency (0.01–1 μm−1) and high spatial frequency (1–100 μm−1) ranges. |
| Databáze: | OpenAIRE |
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