Strain Imaging of Lead-Zirconate-Titanate Thin Film by Tunneling Acoustic Microscopy

Autor:	Kushida Keiko, Miki Hiroshi, Torii Kazuyoshi, Takata Keiji
Rok vydání:	1994
Předmět:	Materials science Piezoelectric coefficient business.industry Piezoelectric sensor General Engineering General Physics and Astronomy Acoustic microscopy Lead zirconate titanate Piezoelectricity chemistry.chemical_compound Optics chemistry Electric field PMUT Optoelectronics Thin film business
Zdroj:	Japanese Journal of Applied Physics. 33:3193
ISSN:	1347-4065 0021-4922
DOI:	10.1143/jjap.33.3193
Popis:	This paper presents a new method for imaging of the piezoelectric property of piezoelectric films with high resolution using tunneling acoustic microscopy. This method is based on detecting fine strains generated by the tip voltage. Such strain is detected either through the surface displacement of the piezoelectric film or through a vibration generated in the film. This method enables us to measure and image the piezoelectric constants, polarization directions, and coercive electric fields of piezoelectric materials.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2db8d22d3cc5c374502cf68f6294ba97 https://doi.org/10.1143/jjap.33.3193 Zobrazit plný text záznamu