| Autor: |
G. Georgelin, M. Schmoger, Eric Gaumont, Alexander Wolter, Harald Schenk |
| Rok vydání: |
2002 |
| Předmět: |
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| Zdroj: |
Proceedings of the 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits (Cat. No.02TH8614). |
| DOI: |
10.1109/ipfa.2002.1025665 |
| Popis: |
We present results of failure and reliability investigations on silicon Micro Scanning Mirrors. The electrical insulation resistance, mechanical shock resistance and long-run stability were characterized. By design optimization including a combination of filled and open insulation trenches we achieve an average insulation resistance of more than 10 G/spl Omega/ at 20 V. The experimental data from devices with an eigenfrequency between 270 Hz and 350 Hz show that they withstand a shock acceleration of more than 6900 g in 3 axes when not operated and of 2500 g at least when operated. This remarkably results are due to several optimized design aspects. In long-run tests with high deflection angles the springs were exposed to a torsional stress of up to 1.5 GPa for more than 1.6/spl times/10/sup 9/ periods. No failure or significant change of the eigenfrequency was observed. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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