Low thermal conductivity of amorphous Si/Si 0.75 Ge 0.25 multilayer films with Au-interlayers

Autor: Zhigang Zeng, F. J. Ye, Zhiyu Hu, Luo Xi, Cong Lin, X. P. Zhang, B. J. Shen, L. C. Dai
Rok vydání: 2014
Předmět:
Zdroj: EPL (Europhysics Letters). 105:27003
ISSN: 1286-4854
0295-5075
DOI: 10.1209/0295-5075/105/27003
Popis: The cross-plane thermal conductivity of amorphous Si/Si0.75Ge0.25 multilayer films with Au-interlayers prepared by magnetron sputtering was successfully measured using a differential technique at room temperature. Though gold has great thermal conductivity, the samples possess a thermal conductivity of 0.53 W/mK, which is about 50% of the amorphous Si/Si0.75Ge0.25 multilayer films. The interfacial thermal resistance is the sum of the phonon-phonon interfacial thermal resistance and the electron-phonon thermal resistance. The thermal conductivity of the samples are significantly determined by the electron-phonon coupling in a metal-nonmetal system and can be lower by choosing a convenient thickness of nonmetal and metal layers.
Databáze: OpenAIRE