Mechanical characterization of membrane like microelectronic components
| Autor: | Ivo W. Rangelow, W. Fallman, Ernst Haugeneder, Hans Loschner, Tibor Lalinský, M. Drık, P. Hudek, Y. Sarov, J. Chlpık |
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| Rok vydání: | 2006 |
| Předmět: |
business.industry
Chemistry Deformation (meteorology) Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Characterization (materials science) Quantitative Biology::Subcellular Processes Vibration Interferometry Autocollimation Optics Membrane Microelectronics Electrical and Electronic Engineering business Laser Doppler vibrometer |
| Zdroj: | Microelectronic Engineering. 83:1036-1042 |
| ISSN: | 0167-9317 |
| Popis: | The tools of optical measurement of deformation are increasingly used to characterize both the mechanical and the thermal properties of MEMS components and especially membranes. In the paper the application of optical methods for membranes tension measurement, their thickness variations and vibrational mode shapes identification of membrane like microcomponents is reported. Using of several sophisticated optical techniques is reviewed such as autocollimation observation of the radii of curvature of deflected 6-in. large membranes, Fizeau interferometry of membrane thickness, Laser doppler vibrometry for membrane vibration movement and deformation propagation and also time-average recording of vibrational mode structure. Specific features of the methods, their performances and limitations regarding practical experience of the exploitation are reported, too. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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