Silicon based electrode arrays
| Autor: | H.T. Nagle, R.B. Ash, J.W. Buchanan, J.J. Wortman |
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| Rok vydání: | 2003 |
| Předmět: |
Fabrication
Materials science Silicon business.industry Electrical engineering chemistry.chemical_element Hardware_PERFORMANCEANDRELIABILITY Substrate (electronics) Microelectrode chemistry Hardware_GENERAL Electrode Hardware_INTEGRATEDCIRCUITS Electrode array Microelectronics Optoelectronics business Chemically modified electrode |
| Zdroj: | Images of the Twenty-First Century. Proceedings of the Annual International Engineering in Medicine and Biology Society. |
| Popis: | The manufacture of a three-dimensional, silicon-based, high-density electrode array with potential biomedical applications is described. Microelectronic fabrication techniques are used to produce an array of regularly spaced electrodes with sensing sites on the order of tens of micrometers. This electrode array consists of a pin-cushion of silicon posts set in an insulating substrate and plated with thin-film conductors and dielectrics. Since it is based on silicon, the array is suitable for integrated data processing and multiplexing, which would allow a large number of electrodes to be monitored simultaneously. > |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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