A time-of-flight detector for heavy ion RBS
| Autor: | P.C. Haubert, R.P. Livi, T. A. Tombrello, Stephen Spicklemire, D.L. Weathers, M. Döbeli |
|---|---|
| Rok vydání: | 1991 |
| Předmět: |
Nuclear and High Energy Physics
Time of flight detector Spectrometer Resolution (mass spectrometry) Analytical chemistry chemistry.chemical_element Ion Condensed Matter::Materials Science Periodic table (crystal structure) chemistry Atomic physics Nuclear Experiment Instrumentation Arsenic Quantum well Indium |
| Zdroj: | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. :764-767 |
| ISSN: | 0168-583X |
| DOI: | 10.1016/0168-583x(91)95022-6 |
| Popis: | We describe the details and performance of a time-of-flight (TOF) spectrometer for application in heavy ion RBS. An energy resolution of better than 1% is achieved for ^(16)O and ^(35)Cl ions in the energy range between 3 and 15 MeV. Using ions with a mass up to 45 amu as projectiles a mass resolution between 1 and 2 amu is obtained over the whole periodic table. At the sample surface a depth resolution of ∼ 1 μg/cm^2 can be achieved. The technique has been used to measure indium profiles in In GaAs/GaAs quantum well samples with a depth resolution of 2 nm, and to determine the arsenic loss in annealed GaAs samples. Further applications and improvements of the spectrometer will be discussed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|