| Autor: |
B. Bolliger, J.M. Dodson, D.J. Twitchen, R.S. Balmer |
| Rok vydání: |
2013 |
| Předmět: |
|
| Zdroj: |
International Symposium on Microelectronics. 2013:000511-000515 |
| ISSN: |
2380-4505 |
| DOI: |
10.4071/isom-2013-wa36 |
| Popis: |
Data is presented on state-of-the-art microwave plasma assisted chemical vapour deposited (CVD) diamond films with thicknesses between 0.1 and 0.8 mm. Infrared transmission measurements are compared with through-thickness and in-plane thermal conductivities measured using thermal flash and heated bar techniques, respectively. A simple model is presented and discussed on the correlation between thermal conductivity and the integrated absorption in the infrared region of the spectrum between 2760 and 3030 cm−1. This correlation opens the possibility to a cost effective, repeatable measurement methodology accurate enough for quality control and new recipe development. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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