Nanostructured ITO/SiO2 Coatings
| Autor: | L. K. Markov, I. P. Smirnova, A. S. Pavluchenko |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Materials science Whiskers chemistry.chemical_element 02 engineering and technology engineering.material Sputter deposition 021001 nanoscience & nanotechnology Condensed Matter Physics Tin oxide 01 natural sciences Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Coating chemistry 0103 physical sciences engineering Degradation (geology) Composite material 0210 nano-technology Layer (electronics) Electrical conductor Indium |
| Zdroj: | Semiconductors. 53:1033-1037 |
| ISSN: | 1090-6479 1063-7826 |
| Popis: | The influence of a SiO2 layer deposited onto nanostructured transparent conductive films of indium and tin oxide (ITO) on their optical characteristics is investigated. For this purpose, SiO2 films of various thicknesses are deposited by magnetron sputtering on samples with ITO films containing whiskers of preferentially vertical orientation and possessing steadily decreasing reflectance. It is shown that this makes it possible to attain noticeable coating antireflection under the condition of the uniform overgrowth of ITO whiskers by the SiO2 layer. The influence of the SiO2 layer on the optical characteristics of a dense unstructured ITO film is also investigated. The results for structured and unstructured ITO/SiO2 coatings with identical material mass contents are compared. It is noted that due to the liability of ITO material to degradation during operation in the composition of transparent conductive contacts, the results can also be interesting for the formation of coatings more resistant to the effect of the environment. |
| Databáze: | OpenAIRE |
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