Rapid optical measurement of surface roughness of BiFeO3 films for nonvolatile memory application

Autor:	Chin-Sheng Chao, Chil-Chyuan Kuo
Rok vydání:	2010
Předmět:	Observational error Materials science genetic structures business.industry education Inspection time humanities eye diseases Atomic and Molecular Physics and Optics Non-volatile memory Optics Surface roughness sense organs Thin film business Engineering (miscellaneous)
Zdroj:	Journal of Russian Laser Research. 31:239-244
ISSN:	1573-8760 1071-2836
DOI:	10.1007/s10946-010-9144-4
Popis:	An optical inspection system for rapid surface roughness measurement of BiFeO3 (BFO) thin films is developed. It is found that y = −121.45 x + 212.81 is a trend equation for characterizing the surface roughness of BFO thin films. The incident angle of 60◦ is a good candidate for measuring the surface roughness of BFO thin films. The maximum measurement error rate of the optical inspection system developed is less than 2.6%. The savings in inspection time of the surface roughness of BiFeO3 thin films is up to 90%.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2c992a11b4ebbf5d7de6bd28adc40a71 https://doi.org/10.1007/s10946-010-9144-4 Zobrazit plný text záznamu Full text from SpringerLink