ZrN as barrier film between Au and SiO/sub 2/: microstructural stability of the system

Autor:	Z. Bogdanov, N. Popovic, M. Zlatanovic, B. Goncic
Rok vydání:	2002
Předmět:	chemistry.chemical_compound Materials science chemistry Annealing (metallurgy) Sputtering Gold film Metallurgy Thermal Oxide Analytical chemistry Microporous material Microstructure Ion bombardment
Zdroj:	Proceedings of International Conference on Microelectronics.
DOI:	10.1109/icmel.1995.500838
Popis:	The microstructural stability of ZrN/Au structures sputtered onto oxidized Si substrates was studied. The analyses of surface morphology and in depth microstructural changes after thermal activation up to 500/spl deg/C, 30 min. were enabled by sequential low energy ion bombardment. The analysis was performed by SEM, STM, AES and ESCA methods. Formation of oxide on the upper surface of the system and micropore development in the gold film for vacuum annealing was analyzed. The best microstructural stability was obtained for ZrN/Au structures annealed in N/sub 2/ atmosphere.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2c74863042a4468d2f3423668c154e6e https://doi.org/10.1109/icmel.1995.500838 Zobrazit plný text záznamu