| Autor: |
C.W. Storment, John W. Suh, Gregory T. A. Kovacs |
| Rok vydání: |
2005 |
| Předmět: |
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| Zdroj: |
Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95. |
| DOI: |
10.1109/sensor.1995.721814 |
| Popis: |
Novel multi-segment organic thermal actuators have been fabricated which consist of Ti/W thin-film heater resistors embedded between two different polyimide layers. Power dissipated in the resistor in each segment causes a local temperature increase and mechanical movement. Each segment can be individually actuated. The temperature coefficient of resistance of the heaters was first shown to be linear and then used with a custom drive circuit to provide dynamic temperature measurements at desired segments during operation. The actuators were operated in room air, in liquids, and in vacuum; their dynamic operating characteristics were measured and their operation as vacuum sensors was demonstrated. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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