GLASS-LIKE CARBON SPUTTERING TARGET FOR PROTECTIVE LAYER

Autor:	Tsutomu Isobe, Michihide Yamauchi
Rok vydání:	1989
Předmět:	Materials science chemistry Sputtering chemistry.chemical_element Electrical and Electronic Engineering Composite material Condensed Matter Physics Instrumentation Carbon Layer (electronics) Electronic Optical and Magnetic Materials
Zdroj:	Journal of the Magnetics Society of Japan. 13:S1_179-184
ISSN:	1880-4004 0285-0192
DOI:	10.3379/jmsjmag.13.s1_179
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2c4bc21fc8474cd465f1129fd8a0f4dc https://doi.org/10.3379/jmsjmag.13.s1_179 Zobrazit plný text záznamu