Phase-Sensitive Optical Coherence Microscopy of Integrated Nanophotonics Devices

Autor:	Evgeny V. Lyubin, Maxim A. Sirotin, Vladimir O. Bessonov, Kirill R. Safronov, Irina V. Soboleva, Andrey A. Fedyanin, Daniil V. Akhremenkov
Rok vydání:	2021
Předmět:	History Materials science Phase sensitive business.industry Nanophotonics Optical coherence microscopy Optoelectronics business Computer Science Applications Education
Zdroj:	Journal of Physics: Conference Series. 2015:012143
ISSN:	1742-6596 1742-6588
DOI:	10.1088/1742-6596/2015/1/012143
Popis:	We report on the development of a new approach for studying the internal structure of polymer integrated nanophotonics devices using phase-sensitive optical coherence microscopy. Visualization and flaw detection of devices and their internal structure was carried out using the example of coupling gratings and prisms for a miniature Otto configuration with a characteristic gap height of 50-300 nm.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2c4ac7a75543e0c455389a72fa7ec66c https://doi.org/10.1088/1742-6596/2015/1/012143 Zobrazit plný text záznamu