Toward two-dimensional self-organization of nanostructures using wafer bonding and nanopatterned silicon surfaces
| Autor: | Jean-Luc Rouvière, François Rieutord, K. Rousseau, Pascal Gentile, Noël Magnea, Gilles Renaud, Hubert Moriceau, Joël Eymery, F. Fournel, Denis Buttard, F. Leroy |
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| Rok vydání: | 2002 |
| Předmět: |
Materials science
Silicon Condensed matter physics Wafer bonding business.industry Scattering chemistry.chemical_element Condensed Matter Physics Atomic and Molecular Physics and Optics law.invention Condensed Matter::Materials Science Optics chemistry Transmission electron microscopy law Quantum dot Wafer Electrical and Electronic Engineering Scanning tunneling microscope Dislocation business |
| Zdroj: | IEEE Journal of Quantum Electronics. 38:995-1005 |
| ISSN: | 0018-9197 |
| DOI: | 10.1109/jqe.2002.801003 |
| Popis: | The structure of ultrathin silicon layers obtained by molecular hydrophobic bonding is investigated. The twist and tilt angles between the two crystals are accurately controlled. The buried Si|Si interface is observed by transmission electron microscopy and by grazing incidence X-ray techniques. For low twist angle values (/spl psi/ |
| Databáze: | OpenAIRE |
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