Design of V-Flexure Axial Adjusting Mechanism of Lithograph Projection Objective

Autor:	巩岩 Gong Yan, 孙振 Sun Zhen
Rok vydání:	2013
Předmět:	Physics Mechanism (engineering) Mathematical optimization Electrical and Electronic Engineering Projection (set theory) Topology Atomic and Molecular Physics and Optics
Zdroj:	Laser & Optoelectronics Progress. 50:101101
ISSN:	1006-4125
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2c1da084e0443a4417b93336bbb009d1 https://doi.org/10.3788/lop50.101101 Zobrazit plný text záznamu