New Characterization of TiSi2 Local Wiring Technology and Its Impact on Low Power / High Speed Quarter Micron CMOS
| Autor: | Hiroshi Onoda, Nobuo Ozawa, Atsushi Ohtomo, Jiro Ida, Makiko Kageyama |
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| Rok vydání: | 1995 |
| Předmět: | |
| Zdroj: | Extended Abstracts of the 1995 International Conference on Solid State Devices and Materials. |
| DOI: | 10.7567/ssdm.1995.pc-3-7 |
| Databáze: | OpenAIRE |
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