Numerical studies of flow patterns during Czochralski growth of square-shaped Si crystals
| Autor: | Ch. Frank-Rotsch, Peter Rudolph, Wolfram Miller |
|---|---|
| Rok vydání: | 2011 |
| Předmět: |
Physics
Field (physics) Silicon business.industry Rotational symmetry chemistry.chemical_element Condensed Matter Physics Computational physics Magnetic field Inorganic Chemistry symbols.namesake Optics chemistry Materials Chemistry Fluid dynamics symbols Boundary value problem business Lorentz force Melt flow index |
| Zdroj: | Journal of Crystal Growth. 318:244-248 |
| ISSN: | 0022-0248 |
| DOI: | 10.1016/j.jcrysgro.2010.10.098 |
| Popis: | We have performed 3D calculations of the melt flow during Czochralski growth of nearly square-shaped silicon crystals by means of Ansys-cfx. Beforehand, the temperature field in the furnace has been computed by axisymmetric computations using CrysMAS for providing thermal boundary conditions for the local simulation of the melt flow. CrysMAS has been also used for the computations of Lorentz force densities, produced by a travelling magnetic field using the KRIST MAG ˜ ® approach. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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