Measurements of ionization and attachment coefficients in 0.468% and 4.910% c-C4F8/Ar mixtures and pure c-C4F8
Autor: | Masahiro Yamaji, Yukihiko Morokuma, Yoshiharu Nakamura |
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Rok vydání: | 2004 |
Předmět: | |
Zdroj: | Journal of Physics D: Applied Physics. 37:432-437 |
ISSN: | 1361-6463 0022-3727 |
Popis: | We measured the density normalized ionization coefficients and attachment coefficients in diluted c-C4F8/Ar mixtures and in pure perfluorocyclobutane (c-C4F8) by the steady-state Townsend method. The ionization coefficients in the mixture gas are almost equal to those in pure argon at the high E/N range but differ considerably at the low E/N range. The present coefficients in pure c-C4F8 agree well with previously reported values at the high E/N range, but there are significant differences at the low E/N range. Measurements in the low E/N range were difficult, and there are few data of the attachment coefficients. |
Databáze: | OpenAIRE |
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