Measurements of ionization and attachment coefficients in 0.468% and 4.910% c-C4F8/Ar mixtures and pure c-C4F8

Autor: Masahiro Yamaji, Yukihiko Morokuma, Yoshiharu Nakamura
Rok vydání: 2004
Předmět:
Zdroj: Journal of Physics D: Applied Physics. 37:432-437
ISSN: 1361-6463
0022-3727
Popis: We measured the density normalized ionization coefficients and attachment coefficients in diluted c-C4F8/Ar mixtures and in pure perfluorocyclobutane (c-C4F8) by the steady-state Townsend method. The ionization coefficients in the mixture gas are almost equal to those in pure argon at the high E/N range but differ considerably at the low E/N range. The present coefficients in pure c-C4F8 agree well with previously reported values at the high E/N range, but there are significant differences at the low E/N range. Measurements in the low E/N range were difficult, and there are few data of the attachment coefficients.
Databáze: OpenAIRE