SIMS and RBS investigations of implanted layers

Autor: A.A. Yatis, L.N. Puchkaryova, V.M. Zavodchikov, N.N. Nikitenkov
Rok vydání: 1986
Předmět:
Zdroj: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 17:62-65
ISSN: 0168-583X
DOI: 10.1016/0168-583x(86)90453-2
Popis: Niobium and ARMCO iron were implanted with nanosecond pulses of 0.4–0.6 MeV carbon ions and niobium and beryllium with microsecond pulses of 80 keV tungsten ions. The implanted samples were investigated by Secondary Ion Mass Spectrometry (SIMS) and Rutherford back-scattering (RBS). A surface layer of 500–1000 A in thickness has been found to differ from that of the unirradiated targets by a higher content of foreign and bulk impurities as well as in the values of the surface-binding energy A and the electron work function ϑ . Pulse implantation of carbon has been found to result in formation of laminated structure in iron through the whole analyzed depth of ≈ 5 μm with interchanging carbide and austenite layers. A method for calculation of the unknown parameters A and ϑ based on SIMS energy spectra is further presented.
Databáze: OpenAIRE