Ion scattering and electron spectroscopy of the chemical species at a HF-prepared Si(211) surface

Autor:	M. Groenert, M. Jaime-Vasquez, M. Martinka, John H. Dinan
Rok vydání:	2006
Předmět:	Chemical species Physics and Astronomy (miscellaneous) Chemical bond Chemistry Scattering Desorption Analytical chemistry Thermal desorption Spectroscopy Electron spectroscopy Ion
Zdroj:	Applied Physics Letters. 88:031910
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.2166682
Popis:	The species and the nature of their chemical bonds at the surface of a hydrogen-terminated Si(211) wafer were characterized using temperature desorption spectroscopy, ion scattering spectroscopy, and electron spectroscopy. The surface region is dominated by monohydride species with dihydrides present in small amounts. Fluorine is distributed across the top layer as largely a physisorbed species to the Si substrate. Low-energy He+3 ions remove the H and F species with only minimal damage to the underlying region.
Databáze:	OpenAIRE
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