Spectroscopic determination of cold electrons in electron cyclotron resonance discharges with highly charged ions
| Autor: | V. F. Bratsev, Klaus Wiesemann, D. O. Bolshukhin, D. B. Kokh, N. K. Bibinov, I. P. Vinogradov, V. I. Ochkur |
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| Rok vydání: | 1998 |
| Předmět: | |
| Zdroj: | Review of Scientific Instruments. 69:1200-1202 |
| ISSN: | 1089-7623 0034-6748 |
| DOI: | 10.1063/1.1148665 |
| Popis: | A spectroscopic method based on the analysis of molecular and atomic spectra of nitrogen was used for the determination of electron distribution functions (EDFs) in electron cyclotron resonance (ECR) discharges run in nitrogen. EDFs were determined for the plasma region seen by the VUV-monochromator. This region includes the hot core plasma surrounded by a less dense and not so hot halo plasma. The EDF between 1.5 and 4.5 eV was determined from the vibrational distribution of excited molecular states of nitrogen, and that in the energy range above 8.5 eV was evaluated from the intensities of different emission lines and bands of NI and N2. The shape of the EDF in the energy range between 4.5 and 8.5 eV was interpolated by using the electron density measured with Langmuir probes and normalizing the EDF to the same density. Due to the low gas pressure of 2×10−5 Torr vibrational relaxation processes on the discharge chamber wall had to be taken into account. In the wavelengths range 30–400 nm the emission sp... |
| Databáze: | OpenAIRE |
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