A 4-DOF MEMS Energy Harvester Using Ultrasonic Excitation
| Autor: | S. O. Reza Moheimani, Anthony G. Fowler |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
Microelectromechanical systems
Engineering business.industry Orientation (computer vision) Electric potential energy Acoustics 010401 analytical chemistry Electrical engineering Resonance 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences Transducer Ultrasonic sensor Electric power Electrical and Electronic Engineering 0210 nano-technology business Instrumentation Energy (signal processing) |
| Zdroj: | IEEE Sensors Journal. 16:7774-7783 |
| ISSN: | 2379-9153 1530-437X |
| Popis: | This paper presents a microelectromechanical systems (MEMS)-based energy harvester that is designed to harvest electrical energy from an external source of ultrasonic waves. The harvester features a novel 4-degree-of-freedom (DOF) mechanical design that uses three translational resonance modes and one rotational mode, with electrostatic transducers being implemented to perform the conversion of mechanical to electrical energy. The 4-DOF design of the system allows energy to be harvested regardless of the device’s orientation, which holds particular benefits for potential applications that include the powering of implanted biomedical devices. Full characterization of the fabricated MEMS harvester is performed, which shows that the device is able to generate electrical power outputs of 180, 189, and 49.1 nW due to ultrasonic excitation from the $x$ -, $y$ -, and $z$ -directions, respectively. |
| Databáze: | OpenAIRE |
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