Effect of Thermal Annealing on the Optical and Structural Properties of the a-SiC Thin Films Deposited by DC Magnetron Sputtering

Autor:	S. Merazga, Amer Brighet, Mohamed Kechouane, Aissa Keffous
Rok vydání:	2017
Předmět:	Biomaterials Cancer Research Materials science Polymers and Plastics business.industry Health Toxicology and Mutagenesis Biomedical Engineering Biophysics Optoelectronics Sputter deposition Thin film business Molecular Biology
Zdroj:	NanoWorld Journal.
ISSN:	2379-1101
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2b1b702729f63b51ece37b2a42200c6e https://doi.org/10.17756/nwj.2017-047 Zobrazit plný text záznamu