Spectroscopic ellipsometry investigation on the excimer laser annealed indium thin oxide sol–gel films
| Autor: | Miru Noh, Young Jun Chang, Yongseok Lee, Min Gyu Kang, Jin-Seok Chung, Hyuk Kim, Jung-Hun Park, Il Wan Seo, Junghyun Park, Chong Yun Kang |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Materials science Excimer laser Band gap medicine.medical_treatment Analytical chemistry General Physics and Astronomy chemistry.chemical_element 02 engineering and technology Molar absorptivity 021001 nanoscience & nanotechnology 01 natural sciences law.invention Indium tin oxide chemistry law 0103 physical sciences medicine General Materials Science Laser power scaling Crystallization 0210 nano-technology Indium Sol-gel |
| Zdroj: | Current Applied Physics. 16:145-149 |
| ISSN: | 1567-1739 |
| DOI: | 10.1016/j.cap.2015.11.007 |
| Popis: | We report on the effect of the excimer laser annealing on the electronic properties of indium tin oxide (ITO) sol–gel films by using spectroscopic ellipsometric technique. We found that the excimer laser annealing effectively induces the crystallization as well as condensation of the sol–gel film. As the laser power increased, the carrier concentration and the relaxation time of photo-annealed films increased, with the bandgap shifting to higher energies. Simultaneously, the extinction coefficient values in the visible region were reduced significantly. We suggest that the excimer laser annealing should be a promising method for low temperature preparation of the ITO film on heat-sensitive substrates via the sol–gel process. |
| Databáze: | OpenAIRE |
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