Temperature-induced inconsistency in the pressure sensitivity of polymer-diaphragm-based FP pressure sensors

Autor: YanJin Zhao, NingFang Song, Fuyu Gao, XiaoBin Xu, ZiHang Gao
Rok vydání: 2023
Předmět:
Zdroj: Optical Materials Express. 13:687
ISSN: 2159-3930
Popis: Fiber optic Fabry-Perot Interferometer benefits many requirements in pressure sensing. The variation of pressure sensitivity of the polymer-diaphragm-based Fabry-Perot pressure sensor with temperature is studied by investigating the thermal effect of the cavity air and the diaphragm separately. FP cavity vacuum treatment and multi-curvature diaphragm simulation and experimental studies are conducted. Experimental results show that the sensor pressure sensitivity decreases with increasing temperature by 0.46nm/(kPa·°C). The diaphragm’s thermal effect is the leading cause of temperature-induced inconsistency in pressure sensitivity, accounting for 0.43nm/(kPa·°C).
Databáze: OpenAIRE