| Autor: |
Robert W. Cohn, Scott D. Cambron, Steven A. Harfenist, Robert S. Keynton |
| Rok vydání: |
2004 |
| Předmět: |
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| Zdroj: |
2003 Third IEEE Conference on Nanotechnology, 2003. IEEE-NANO 2003.. |
| DOI: |
10.1109/nano.2003.1230971 |
| Popis: |
An atomic force microscope (AFM) is used as a micromanipulator to fabricate freestanding micron diameter wires and bridges in a matter of minutes by pulling polymer materials into fibers. The fabrication procedure appears to have significant application in easier and more rapid prototyping of micro-, nano- and MEMS devices. While fiber pulling technology has advanced to high degrees of perfection, our process represents the first time that a nano-positioning tool has been used to fabricate three-dimensional microstructures with a degree of flexibility and simplicity far exceeding traditional MEMS and microfabrication processing methods. Preliminary efforts at demonstrating the use of the fibers in device fabrication and applications are also presented. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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