Supercritical CO2/co-solvent extraction of porogens and surfactant templates to obtain ultralow dielectric constant films
| Autor: | W. Volksen, R. D. Miller, Hyungjun Kim, Arnold A. Lubguban, J.A. Lubguban, Shubhra Gangopadhyay, M.T. Othman, Rajesh V. Shende |
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| Rok vydání: | 2008 |
| Předmět: |
Materials science
Thermal decomposition Extraction (chemistry) Metals and Alloys Analytical chemistry Surfaces and Interfaces Dielectric Fourier transform spectroscopy Supercritical fluid Surfaces Coatings and Films Electronic Optical and Magnetic Materials Materials Chemistry Fourier transform infrared spectroscopy Thin film Mesoporous material |
| Zdroj: | Thin Solid Films. 516:4733-4741 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/j.tsf.2007.08.099 |
| Popis: | A method of pore generation by supercritical CO2 (SCCO2) and co-solvent extraction for the preparation of nanohybrid film and mesoporous organosilicate thin film for ultralow dielectric constant materials is investigated. The films were treated with SCCO2/methyl ethyl ketone-tetrahydrofuran co-solvent combination and it was found that the treatment produced dielectric constant (k) values of 2.30 for closed-pore and 1.61 for open-pore nanohybrid films; 2.14 for cetyl trimethylammonium bromide-based and 2.50 for polyethylene glycol octadecyl ether-based films. These results suggest that the SCCO2/co-solvent treatment produces closely comparable results with thermal decomposition in terms of Fourier Transform Infrared spectroscopy data, optical constants obtained from variable angle spectroscopic ellipsometry, and k values. |
| Databáze: | OpenAIRE |
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