Surface haze in the Stokes-Mueller representation
Autor: | Eugene L. Church, John C. Stover |
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Rok vydání: | 1996 |
Předmět: | |
Zdroj: | SPIE Proceedings. |
ISSN: | 0277-786X |
DOI: | 10.1117/12.256191 |
Popis: | This paper derives the Mueller scattering matrices for two topographic scattering models--the Rayleigh-Rice or perturbation model and the geometrical-optics or facet model. The results are used to predict the polarimetric properties of the `haze' on silicon-wafer surfaces. |
Databáze: | OpenAIRE |
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