Surface haze in the Stokes-Mueller representation

Autor: Eugene L. Church, John C. Stover
Rok vydání: 1996
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
DOI: 10.1117/12.256191
Popis: This paper derives the Mueller scattering matrices for two topographic scattering models--the Rayleigh-Rice or perturbation model and the geometrical-optics or facet model. The results are used to predict the polarimetric properties of the `haze' on silicon-wafer surfaces.
Databáze: OpenAIRE