Low power consumption and high resolution 1280X960 Gate Assisted Photonic Demodulator pixel for indirect Time of flight

Autor: H. Yamagishi, Y. Ebiko, K. Tatani, T. Ueno, S. Hida, T. Terada, S. Maeda, F. T. Brady, Y. Isogai, Y. Hagiwara, Y. Moriyama, S. Han, T. Suwa, T. Michiel, T. Murase, A. Basavalingappa, S. Kameda, K. Koiso, Hayato Iwamoto, H. Arai
Rok vydání: 2020
Předmět:
Zdroj: 2020 IEEE International Electron Devices Meeting (IEDM).
DOI: 10.1109/iedm13553.2020.9372109
Popis: A 1280×960 floating diffusion storage global shutter image sensor is implemented in a 3D stacked back illuminated indirect time of flight sensor (iToF). The sensor, achieves 18,000e- full well capacity and 32% quantum efficiency (QE) with a pyramid surface for diffraction (PSD) structure [1], utilizing a 3.5µm pixel. Low power consumption is also achieved, due to low leakage current for the iToF pixel and low resistance Cu-Cu connection metal wiring. These device architectures enable high resolution and wide dynamic range 3D depth sensing for both near and far objects.
Databáze: OpenAIRE