Preparation and Characteristics of the Ag/SiO2 Nanocomposite Prepared by Magnetron Sputtering and ICP Plasma

Autor: Li Jun Sang, Fen Ce Chen, Hui Qin Zhu, Qiang Chen
Rok vydání: 2014
Předmět:
Zdroj: Applied Mechanics and Materials. 711:143-148
ISSN: 1662-7482
DOI: 10.4028/www.scientific.net/amm.711.143
Popis: Ag/SiOXnanocomposites were successfully fabricated by inductively coupled plasma (ICP) enhanced magnetron sputtering plasma where the hexamethyldisiloxane (HMDSO) was as the monomer for SiOx deposition and Ag nanoparticles were sputtered by Ar ions from Ag target. The main motivation of this work is to clarify the feasibility of Ag/SiOXnanocomposite fabrication in a simultaneous process with plasma technology. Besides the influence of processing parameters on the microstructures and properties of the nanocomposite, such as ICP power, the deposition time and ratio of HMDSO and Argon, is investigated in this paper. With Fourier transform infrared spectroscopy (FTIR), ultraviolet visible spectroscopy (UV-Visible), and atomic force micrograph (AFM) the microstructures of the Ag/SiOXnanocomposite were characterized. It is founded that the microstructures and properties of nanocomposite depend on the discharge parameters. As an application the antibacterial behavior was tested. It indicates that the Ag/SiOx nanocomposites demonstrate an excellent antibiotic effect to colon bacillus and golden brown staphylococcus. It concludes that the Ag/SiOXnanocomposite can be facilely prepared by this processing.
Databáze: OpenAIRE