Modification of a Germanium Surface Exposed to Radiation of a Nanosecond Ultraviolet Laser

Autor:	V. Yu. Zheleznov, T. V. Malinsky, S. I. Mikolutsky, V. E. Rogalin, S. A. Filin, Yu. V. Khomich, V. A. Yamshchikov, I. A. Kaplunov, A. I. Ivanova
Rok vydání:	2021
Předmět:	Materials Chemistry Electrical and Electronic Engineering Condensed Matter Physics Electronic Optical and Magnetic Materials
Zdroj:	Russian Microelectronics. 50:649-656
ISSN:	1608-3415 1063-7397
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::2a0c215da96273e4877eff20d091bd47 https://doi.org/10.1134/s1063739721080102 Zobrazit plný text záznamu Full text from SpringerLink