Modeling and experimental validation of hysteretic scan behavior of quasi-static piezoelectric micromirror
| Autor: | Massimiliano Merli, Gianluca Mendicino, Roberto Carminati, Nicolò Boni |
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| Rok vydání: | 2022 |
| Zdroj: | MOEMS and Miniaturized Systems XXI. |
| DOI: | 10.1117/12.2608531 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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