A Low-Voltage Microwave Plasma Ionizer Without Reduced Ionizing Performance Due to Particle Fuzzballs

Autor:	Byungjin Bae, Jingook Kim, Hyun Yoon, Ho-Jong Hwang
Rok vydání:	2021
Předmět:	Materials science business.industry Plasma Ion source Ionizing radiation Corona (optical phenomenon) Physics::Plasma Physics Cleanroom Physics::Space Physics Electrode Physics::Atomic and Molecular Clusters Optoelectronics Particle Physics::Atomic Physics business Low voltage
Zdroj:	2021 43rd Annual EOS/ESD Symposium (EOS/ESD).
DOI:	10.23919/eos/esd52038.2021.9574764
Popis:	A low-voltage microwave plasma ionizer without reduced ionizer performance due to particle fuzzballs is proposed. After operation for two weeks without maintenance in a cleanroom and a laboratory, the particles and ionizing performance of the plasma ionizer are measured and compared with a conventional corona ionizer.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::29f0343a71148cc2bc3fbfc6a0c08d05 https://doi.org/10.23919/eos/esd52038.2021.9574764 Zobrazit plný text záznamu