An Anti-Aliasing and Self-Clocking ΣΔM Cobweb-Like Disk Resonant MEMS Gyroscope with Extended Input Range
Autor: | Xinxin Li, Wei Zhou, Dacheng Xu, Zuxiang Wen, Fang Chen |
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Rok vydání: | 2021 |
Předmět: |
Materials science
010401 analytical chemistry Vibrating structure gyroscope Gyroscope 02 engineering and technology 021001 nanoscience & nanotechnology Anti-aliasing 01 natural sciences Signal 0104 chemical sciences law.invention Reduction (complexity) Signal-to-noise ratio Hardware_GENERAL law Aliasing Limit (music) Electronic engineering 0210 nano-technology |
Zdroj: | 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). |
Popis: | This paper presents a novel anti-aliasing and self-clocking MASH-like electro-mechanical sigma-delta (ΣΔ) modulated MEMS disk resonant gyroscope with multi-bit force-balancing operation. The proposed technique allows extending the input signal range of a ΣΔM disk gyroscope beyond the limit imposed by single-bit stream operation. It effectively circumvents the chopping aliasing effect, which arises from interferences between the base-band signal spectrum and high frequency shaping-noise spectrum. This aliasing effect will lead to a reduction in the signal-to-noise ratio (SNR). Experimental results demonstrated that the proposed technique results in inherent stability and better performances when compared to a conventional approach. |
Databáze: | OpenAIRE |
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